The Department of Integrated Micro/Nano Systems harnesses advanced integrated circuit technologies to pioneer Micro-Electro-Mechanical Systems (MEMS) and innovative integrated micro-nano systems within interdisciplinary fields such as physics, chemistry, and biology. Our research portfolio encompasses the design and fabrication of micro-nano sensors, actuators, fluidic systems, bio-MEMS, flexible MEMS, and cutting-edge packaging technologies. We exhibit particular expertise in physical sensors, including micro accelerometers, sound vector sensors, piezoelectric and ultrasonic MEMS, and inertial sensors. Through extensive collaborations with leading universities, research institutions, and industry partners worldwide, the department advances the frontiers of micro-nano manufacturing processes and system integration. We deliver pioneering solutions for diverse applications such as smart healthcare, environmental monitoring, and human-machine interaction, while cultivating professionals with a global perspective and a strong innovative drive.
