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未名·芯论坛|第四十五期成功举办

7 月 3 日上午,由北京大学集成电路学院、集成电路学院高精尖创新中心、北京大学国家集成电路产教融合创新平台、集成电路科学与未来技术北京实验室、后摩尔时代微纳电子学科创新引智基地、北京大学校友会半导体分会联合主办的“未名·芯”论坛系列讲座第四十五期在微纳电子大厦103报告厅及腾讯会议成功同步举办。本期邀请MNS, KU Leuven(鲁汶大学),Prof. Michael Kraft带来题为“Micro and Nano Systems: An Enabling Key Technology for the 21st Century”的精彩讲座。讲座由北京大学集成电路学院卢奕鹏研究员主持。

Prof. Kraft从对鲁汶大学微纳系统研究机构的介绍中开启了本次报告。鲁汶大学拥有专业的微纳系统研究团队以及在世界上处于先进水平的器件加工能力,拥有硅前道工艺、微纳机电系统(MEMS)加工、先进封装及新兴工艺探索中等多方面的研究制造条件。借助这些条件,Prof. Kraft能够在鲁汶大学开展并长期从事多个方面的微纳机电系统(MEMS)研究工作,诸如物理传感器与执行器的仿真设计与工艺制造,MEMS器件的性能表征,基于机器学习的MEMS器件制作以及基于MEMS的集成生物传感器等。

报告中,Prof. Kraft分别就前述研究方向介绍了一些自己团队的代表性工作。首先是对于MEMS耦合谐振器(coupled resonators)的介绍。利用双阵子耦合振荡系统的同相振动和反相振动的双峰频率响应,Prof. Kraft团队使用改变阵子等效质量的方法,以两种振动模态对应频率响应峰值的位置和强度的变化实现了对外界信息的高信噪比传感。基于这种方法,Prof. Kraft团队成功实现了真空中、空气中和水中的极高品质因数(Q factor)传感检测,并利用相应原理制成了不同结构的质量传感器、生物化学传感器与体声波传感器等。

介绍完具有代表性的耦合谐振器相关工作之后,Prof. Kraft介绍了该研究团队在压电微机械超声换能器(PMUT)领域的代表性工作。在该部分中,Prof. Kraft展示了经过设计实现的高灵敏度PMUT、可大角度折叠的柔性PMUT阵列,以及面向医学成像,基于聚酰亚胺(polyimide)和SU8等材料的柔性PMUT阵列。

近年来,将人工智能、机器学习等优化方法引入各设计与制造产业已成为一种新风向。在后续部分中,Prof. Kraft介绍了引入机器学习优化方法的MEMS谐振器设计相关工作。借助遗传优化算法,该研究团队能够在原始结构层面展开大范围探索,并实现对某一性能指标显著有益的MEMS器件,现阶段该方法已经被引入了微机械谐振器以及微夹持器等MEMS结构的研究。同时,与生物医疗领域的紧密结合也成为MEMS研究的未来主要方向之一,在报告结尾,Prof. Kraft分别介绍了该团队在神经刺激微针以及生化反应传感器领域的相关研究,深入浅出地为大家讲解介绍了相应器件的设计方法与加工制造流程。

讲座结束后,Prof. Kraft就柔性传感器制作、PMUT性能设计trade-off、微纳换能器与机器学习相结合的可能性与应用前景、使用机器学习设计微纳器件的时间成本等问题进行了深入交流探讨,并就相关研究方向的未来发展前景予以展望。

个人简介:

Michael Kraft is a full Professor of Micro- and Nanosystems at the University of Leuven, Department of Electrical Engineering in Belgium since 2017. He heads the Research Division Micro- and Nanosystems and is acting director of the Leuven Institute for Micro and Nanoscale Integration (LIMNI). He also is a guest professor at IMEC. His research group currently comprises 22 PhD students, 4 postdocs and 2 technicians.

Before joining KU Leuven, he was a professor at the University of Liege (2015-17) where he was responsible for the Microsys cleanroom. From 2012-2014, he was at the Fraunhofer Institute for Microelectronic Circuits and Systems in Duisburg, Germany, where he was Head of the Department of Micro- and Nanosystems. From 1999 to 2012, he was a faculty member and Professor of Micro-System-Technology at the University of Southampton, UK. He has a broad interest in MEMS and nanotechnology ranging from process development to system integration of MEMS and nano-devices. He has published over 300 peer reviewed journal and conference publications as an author or co-author. He also contributed to four textbooks on MEMS as author and editor. He has served on several steering and technical committees of international conferences such as Transducers, ISSCC, IEEE Sensors, as well as being an associate editor for the IEEE Sensors Letter, IEEE JMEMS.