Liu Peng (Male, 1981) joined Peking University in 2007, is currently a senior engineer at the School of IC PKU. He specializing in the research of microelectronics processing technology, mainly concern is the detection, analysis and application of the electron beam spot and EBL technique. He focuses on the issues of the nano-scale patterning and pattern transferring methods, and explores the technical basis for the continuous application of silicon-based fabrication technics in the future technology nodes.
