I am a lecturer of the School of Integrated Circuits, Peking University. I earned my Ph.D. from the Institute of Microelectronics, Chinese Academy of Sciences in 2002. Afterwards I joined Peking University as a faculty member engaged in teaching and scientific research. My research interests include Nanoelectronic Devices, Electron Beam Lithography, Modeling and Simulation. Multiple academic papers and patents have been published in recent years.
As the project leader, I hosted two projects funded by the National Natural Science Foundation of China:
(1) Research on the Characteristics of Electron Beam Resist Calixarene and Its Application in Nanoscale Electron Beam Lithography;
(2) Molecular Dynamics Simulation Study on Plasma Doping for Ultra-Shallow Junctions.
As a technical backbone, I participated in six national-level projects such as the 973 Program, the 863 Program, and the Electronic Pre-research Project, as well as two industry-collaboration projects.
