Yu，Xiaomei-School Of Integrated Circuits

Faculty

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Faculty

Name： Yu，Xiaomei
Academic Title： Professor
Tel： +86 (10) 62766592
Email： yuxm@pku.edu.cn
Research Interests： My present research interests are in terahertz (THz) metasurface devices, THz FPA imaging, integrated MEMS force sensors, and monolithic integration of MEMS sensor with CMOS circuits.

Educational Experience

1997.09 - 2001.06: Dept. of Material Engineering, Beihang University, Ph.D.. Major: Material Engineering.

1982.09 - 1985.06: Dept. of Electronics Science, Jilin University, MS degree. Major: Semiconductor Physics.

1978.10 - 1982.07: Dept. of Electronics Science, Jilin University, BS degree. Major: Semiconductor Physics.

Work Experience

2003.10 - date: School of Integrated Circuits, Peking University, Professor

2001.10 - 2003.09: Institute of Microelectronics, Peking University, Postdoctoral

2000.11 - 2001.09: Department of Physics, Beihang University, Associate Professor

1999.09 - 2001.10: Department of Micro- and Nanotechnology, Technical University of Denmark, Visiting Scholar

1985.07 - 1999.08: Department of Physics, Beihang University, Lecturer, Assistant professor, Associate professor

Personal Profile

I have been engaged in the researches on the theory, design and processing of micro-nano electromechanical systems for more than 25 years, and has achieved a series of research results in MEMS biochemical sensors, monolithic integration technology of sensors and CMOS circuits, terahertz and infrared focal plane array imaging technology, and super-surface technology. As the project leader, I presided over more than 20 scientific research projects of the National Natural Science Foundation of China, national key research and development plans and so on. I have published more than 200 papers in high-level academic journals in my research fields, such as Journal of Applied Physics, Sensors and Actuators B, Applied Physics Letters, JMEMS, and top international academic conferences in the field of MEMS, such as IEEE MEMS, Transducers and MicroTAS, and authorized and applied for more than 50 patents.