Professor Dacheng Zhang is the Director of Microelectronics proces Lab, Peking University, which is the first-class Micro-Nano technology platform in Chinese universities. Prof Zhang has over 40 years experience in semiconductor process line construction and management, His major research interests are Silicon based fabrication technology, development of semiconductor technology and related equipment, MEMS sensors and actuators, MEMS-IC integration technology, process related on-wafer microstructure mechanical character extraction. His notable contribution is the construction of process related on-wafer microstructure mechanical parameters measurement standard system. As the proposer of China’s first IEC standard in MEMS field, Prof Zhang now has proposed 6 international standards (among them 2 published), which won him IEC “1906” award. His research on monolithic integrated piezoresistive chip based on standard CMOS process provide a low-cost solution for intelligent monolithic integrated piezoresistive sensor industry. Prof Zhang has more than 100 papers and 70 patents(including 2 international patents), He also won second prize of the State Technological Innovation Awards, as well as first prize of Shanghai Science and Technology awards.
