主要开展压电MEMS、超声MEMS、传感器与执行器的设计、加工以及系统集成相关技术研究。其中在压电微型超声传感器（PMUT）的机理、关键工艺、微系统集成和产业化做出了原创性、系统性、突破性的贡献，实现了CMOS集成的PMUT阵列，并将其应用于超声指纹识别传感器，核心技术专利被行业内领军公司竞买并产业化。在高通先进技术研发部主导开发的全球首例微型超声指纹传感器芯片已实现大规模量产，出货超过数亿颗。迄今为止，在集成微纳系统和传感器领域顶级期刊（JMEMS, Microsystems & Nanoengineering, JSSC, TUFFC, APL等）和会议（MEMS, ISSCC, Transducers, IUS等）发表文章数十篇，拥有美国专利30余项（其中20余项已转让或形成产品并量产），英文书籍章节一项，并多次获得重要奖项包括MEMS，ISSCC会议最佳论文，the BEST of BSAC，Super Qualcomm Star等。担任领域内顶级国际期刊IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control (UFFC) 副主编，担任 IEEE MEMS 2025、Transducers 2026、Solid-State Sensors, Actuators and Microsystems（Hilton Head）2022、IEEE International Ultrasonics Symposium (IUS) 2023-2024等多个行业顶级会议的技术委员会委员，担任IEEE SFBA MEMS & Sensor Chapter（2016-2022）委员会委员。主持多项重点研发、国自然等国家级项目。
Publications/Google scholar: https://scholar.google.com/citations?user="7cRd6e4AAAAJ
代表性论著：
1. L. Zhao, J. Xia, C. Yang, and Y. Lu, "Modeling and experimental studies of mutual acoustic radiation effect on PMUT array," Sensors and Actuators A: Physical, vol. 377, p. 115677, 2024
2. L. Zhao, C. Yang, X. Zhang, Z. You and Y. Lu, "Broadband and High-Pressure Output PMUT Array Based on Lead-Free KNN Thin Film," 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS), Austin, TX, USA, pp. 979-982, 2024
3. L. Zhao, C. Yang, X. Zhang, Z. You and Y. Lu, "Design, Fabrication, and Characterization of High-Performance PMUT Arrays Based on Potassium Sodium Niobate," Journal of Microelectromechanical Systems, vol. 33, no. 4, pp. 438-445, Aug. 2024
4. Y. Gao, L. Zhao, C. Yang and Y. Lu, "Ultra-Wide Range Frequency Tuning of Piezoelectric Micromachined Ultrasonic Transducers via DC Bias Voltage," 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS), Austin, TX, USA, pp. 935-93, 2024
5. Y. Gao, L. Zhao, C. Yang and Y. Lu, "Characterization and Optimization of PZT-Based PMUTs With Wide Range Frequency Tuning," Journal of Microelectromechanical Systems, vol. 33, no. 4, pp. 427-437, Aug. 2024
6. Y. Chong, L. Zhao, J. He, J. Gan, A. Bao, Z. You, Y. Gao, I. Kanno and Y. Lu, “A wafer-level characterization method of thin film transverse piezoelectric coefficient evaluation.” Sensors and Actuators A: Physical, vol. 378, p. 115821, 2024
7. Y. Su, Y. Zhang, X. Yang, Y. Lu, L. Lin and X. Guo, “A Curve-Structured Flexible PMUT With Enhanced Acoustic Sensitivity,” 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS), Austin, TX, USA, pp. 939-942, 2024
8. Z. You, C. Yang, J. Gan, R. Tuerhong, L. Zhao and Y. Lu, “Piezoelectric MEMS Microphones Based on Rib-Structures and Single Crystal PZT Thin Film,” Microsystems & Nanoengineering, 2024
9. Y. Fang, L. Zhao, H. Zhang and Y. Lu, “A Miniatured and Wearable Photoacoustic Sensing System for Blood Pressure Monitoring,” 2024 IEEE UFFC-JS, Taipei, September 22-26, 2024
10. Y. Fang, T. Xie, M. Zhang, C. Li, H. Zhang and Y. Lu, “Ring-shaped Transparent and Broadband Ultrasonic Transducer for Photoacoustic Systems,” 2024 IEEE UFFC-JS, Taipei, September 22-26, 2024
11. Y. Guo, C. Zhang, C. Yang, J. Xia, W. Wang and Y. Lu, “Underwater Ultrasound Communication Based on PMUTs With DC Bias Voltage,” 2024 IEEE UFFC-JS, Taipei, September 22-26, 2024
12. Y. Gao, A. Bao, C. Yang, L. Zhao and Y. Lu, “Multi-frequency Harmonic Energy Modification of Piezoelectric Micromachined Ultrasonic Transducer (PMUT) for Advanced Sensing Applications,” 2024 IEEE UFFC-JS, Taipei, September 22-26, 2024
13. J. Xia, T. Xie, Y. Guo, J. Wang, Y. Lu, “Battery Status Monitoring Based on Advanced Ultrasonic Technology,” 2024 IEEE UFFC-JS, Taipei, September 22-26, 2024
14. C. Yang, J. He, L. Zhao, Z. You, A. Bao, I. Kanno and Y. Lu, “A Simplified and Wafer-Level Thin Film Characterization of Transverse Piezoelectric Coefficient,” 2024 IEEE UFFC-JS, Taipei, September 22-26, 2024
15. Z. You, C. Yang, L. Zhao, Y. Lu, “Three-Port Piezoelectric Microphone with Stiffness Modification Based on DC Bias,” 2024 IEEE UFFC-JS, Taipei, September 22-26, 2024
16. L. Zhao, C. Yang, Y. Guo, Y. Lu, “Rectangular PMUT Phased Array With High Fill-Factor and High Sound Pressure Level,” 2024 IEEE UFFC-JS, Taipei, September 22-26, 2024
17. J. Gan, Z. You, C. Yang, Y. Lu, “Modeling of PMUTs with Non-Uniform Membrane Based on The Variational Principle,” 2024 IEEE UFFC-JS, Taipei, September 22-26, 2024
18. T. Xie, J. Wang, C. Yang, J. Xia, W. Wang and Y. Lu, “Detection of Surface Icing Based on Piezoelectric Micromachined Ultrasonic Transducers (PMUTs),” 2024 IEEE UFFC-JS, Taipei, September 22-26, 2024
19. L. Zhao and Y. Lu, “Piezoelectric Micromachined Ultrasonic Transducers for Consumer Electronics Applications,” 2023 7th IEEE Electron Devices Technology & Manufacturing Conference (EDTM), Seoul, March 07-10, 2023
20. Y. Lu, H. Tang, S. Fung, Q. Wang, J.M. Tsai, M. Daneman, B.E. Boser, and D.A. Horsley, " Ultrasonic Fingerprint Sensor Using a Piezoelectric Micromachined Ultrasonic Transducer Array Integrated with CMOS Electronics", Applied Physics Letters, 106, p. 263503, 2015 (Cover)
21. Y. Lu, H. Tang, S. Fung, B.E. Boser, and D.A. Horsley, "Pulse-Echo Ultrasound Imaging Using an AlN Piezoelectric Micromachined Ultrasonic Transducer Array with Transmit Beam-Forming", J. Microelectromechanical Systems, 99, pp. 1-9, 2016
22. Y. Lu, H. Tang, Q. Wang, S. Fung, J.M. Tsai, M. Daneman, B.E. Boser, and D.A. Horsley, "Waveguide piezoelectric micromachined ultrasonic transducer array for short-range pulse-echo imaging", Applied Physics Letters, 106, p. 193506, 2015
23. Y. Luand D.A. Horsley, "Modeling, Fabrication and Characterization of Piezoelectric Micromachined Ultrasonic Transducer Arrays Based on Cavity SOI Wafers", J. Microelectromechanical Systems, 24(4), pp. 1142-1149, 2015
24. Y. Lu, A. Heidari, and D.A. Horsley, "A High Fill-Factor Annular Array of High Frequency Piezoelectric Micromachined Ultrasonic Transducers", J. Microelectromechanical Systems, 24(4), pp. 904-913, 2015
25. X. Jiang, Y. Lu, H.Y. Tang, J.M. Tsai, E.J. Ng, M.J. Daneman, B.E. Boser, D.A. Horsley, “Monolithic Ultrasound Fingerprint Sensor”, Microsystems & Nanoengineering - Nature, Vol. 3, p. 17059, 2017
26. H.Y. Tang, Y. Lu, X. Jiang, E.J. Ng, J.M. Tsai, D.A. Horsley, B.E. Boser, “3-D Ultrasonic Fingerprint Sensor-on-a-Chip”, IEEE Journal of Solid-State Circuits, 51 (11), 2016
27. Y. Lu, X. Wu, W. Zhang, W. Chen, et al, “Research on Reference Vibration for Two-axis Piezoelectric Micro-Machined Gyroscope” Journal of Micromechanics and Microengineering, 20 (07), p. 5039, 2010
28. Q. Wang, Y. Lu, S. Mishin, Y. Oshmyansky, D.A. Horsley, Design, Fabrication, and Characterization of Scandium Aluminum Nitride-Based Piezoelectric Micromachined Ultrasonic Transducers, J. Microelectromechanical Systems, 26 (5), pp. 1132-1139, 2017
29. Y. Lu,X. Wu, W. Zhang, and W. Chen, “Optimization and Analysis of Novel Piezoelectric Solid Micro-Gyroscope with High Resistance to Shock” Microsystem technologies, 16, pp. 571–584, 2010
30. Y. Lu, H. Tang, S. Fung, B. E. Boser, and D. A. Horsley, "Short-Range and High-Resolution Ultrasound Imaging Using an 8 MHz Aluminum Nitride PMUT Array," IEEE MEMS, pp. 140-143, 2015. Best Paper Award Finalist
31. Y. Lu, O. Rozen, H. Tang, G.L. Smith, S. Fung, B.E. Boser, R.G. Polcawich, D.A. Horsley, "Broadband piezoelectric micromachined ultrasonic transducers based on dual resonance modes," IEEE MEMS, pp. 146-149, 2015
32. Y. Lu, A. Heidari, S. Shelton, A. Guedes and D.A. Horsley, "High frequency piezoelectric micromachined ultrasonic transducer array for intravascular ultrasound imaging," IEEE MEMS, pp. 745-748, 2014
33. Y. Lu, S. Shelton and D.A. Horsley, "High frequency and high fill factor piezoelectric micromachined ultrasonic transducers based on cavity SOI wafers", Solid-State Sensors, Actuators and Microsystems Workshop (Hilton Head), pp. 131-134, 2014
34. H. Tang, Y. Lu, F. Assaderaghi, M. Daneman, X. Jiang, M. Lim, X. Li, E. Ng, U. Singhal, J.M.Tsai, D.A. Horsley, B.E. Boser, “3-D Ultrasonic Fingerprint Sensor on a Chip”, ISSCC, pp. 202-203, 2016, Lewis Winner Award
35. H. Tang, Y. Lu, S. Fung, D.A. Horsley, B.E. Boser, "Integrated Ultrasonic System for Measuring Body-Fat Composition", ISSCC, pp. 1-3, 2015
36. X. Jiang, H. Tang, Y. Lu, X. Li, J.M.Tsai, E. Ng, M. Daneman, M. Lim, F. Assaderaghi, B.E. Boser, D.A. Horsley, “Monolithic 591×438 DPI Ultrasonic Fingerprint Sensor”, IEEE MEMS, pp. 107-110, 2016 Best Paper Award
37. Y. Lu, Q. Wang, and D.A. Horsley, “Piezoelectric Micromachined Ultrasonic Transducers with Increased Coupling Coefficient via Series Transduction”, IEEE International Ultrasonics Symposium (IUS), pp. 1-4, 2015
38. H. Tang, Y. Lu, S. Fung, J.M. Tsai, M. Daneman, D.A. Horsley, B.E. Boser, “Pulse-echo ultrasonic fingerprint sensor on a chip”, Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), pp. 674-677, 2015
39. X. Jiang, H. Tang, Y. Lu, E.J. Ng, J.M. Tsai, B.E. Boser, D.A. Horsley, “Ultrasonic Fingerprint Sensor With Transmit Beamforming Based on a PMUT Array Bonded to CMOS Circuitry”, IEEE Transactions on UFFC, 64(9), pp1401-1408, 2017
代表性知识产权：
1. Y. Lu, D.A. Horsley, H. Tang, and B.E. Boser, “MUT Fingerprint ID System”, 2014, US Patent 14/896,150.已转让并产业化（被业界领军公司竞买，被其他美国专利他引43次）。
2. Y. Lu, H.Y., Tang, H.V. Panchawagh, “Superpixel Array of Piezoelectric Ultrasonic Transducers for 2-D Beamforming”, 2016, US Patent US 14/883,586.
3. Y. Lu, D.W. Burns, “Biometric System with Photoacoustic Imaging”, 2017, US Patent 15/149, 048. 生物识别、人机交互传感
4. Y. Lu, D.W. Burns, “Biometric system with photoacoustic imaging”, 2017, US Patent 15/149,046. 医疗健康。
5. Y. Lu, J.L. Strohmann, H.V. Panchawagh, “Reducing background signal in imaging sensors”, 2019, US Patent 10,817,694.
6. Y. Lu, H.V. Panchawagh, K.D. Djordjev, J.H. Seo, N.I. Buchan, C.J. Tseng, T Kao, “Ultrasonic fingerprint sensor with flexible substrate”, 2020, US Patent 16/525,030.。
7. Y. Lu, H.V. Panchawagh, K.D. Djordjev, C.J. Tseng, N.I. Buchan, T. Kao, J.H. Seo, “Ultrasonic fingerprint sensor with electrically nonconductive acoustic layer”, 2019, US Patent App. 16/252,408.
8. Y. Liang, Y. Lu, H.V. Panchawagh, J.L. Strohmann, C. Xu, Temperature and ultrasonic sensor fusion for biometric sensing, 2020, US Patent 11/182,026.
9. Y. Kusano, Y. Lu, J.L. Strohmann, H.V. Panchawagh, Ultrasonic sensor array, 2019, US Patent 16/455,472.
10. Y. Lu, J.L. Strohmann, I Badge, H.V. Panchawagh, T. Kao, Apparatus and method for improved biometric sensing, 2019, US Patent 16/544,681.
11. H. Tang, Y. Lu, H.V. Panchawagh, Active beam-forming technique for piezoelectric ultrasonic transducer array, 2018, US Patent 14/883,585.
12. Y. Lu, H.V. Panchawagh, J.L. Strohmann, K.D. Djordjev, “Ultrasonic sensor array control to facilitate screen protectors”, 2020, US Patent 16/414,164.
13. J.L. Strohmann, Y. Lu, H.V. Panchawagh, “Broadband ultrasonic sensor”, 2020, US Patent 16/407,070.
14. J.L. Strohmann, Y. Lu, A. Hinger, D.W. Burns, Ultrasonic biometric system with harmonic detection, 2018, US Patent App. 15/804,902
15. D.A. Horsley, Y. Lu, O. Rozen, 书籍"Piezoelectric MEMS Resonators", 章节6，"Flexural Piezoelectric Resonators", 153-173, Springer International Publishing，2017.
